Crucible Rotation Speed Control Strategy of Czochralski Single Crystal Furnace based on Linear Active Disturbance Rejection Control

Kaiming Yang; Xiaotao Chen; Dedong Gao

doi:10.6919/ICJE.202504_11(4).0054

Authors

Kaiming Yang
Xiaotao Chen
Dedong Gao

DOI:

https://doi.org/10.6919/ICJE.202504_11(4).0054

Keywords:

Czochralski Single Crystal Furnace; PID; Active Disturbance Rejection Control; Crucible Speed Control.

Abstract

Aiming at the problems of nonlinearity, strong coupling and interference suppression in the crucible speed control of Czochralski single crystal furnace, this paper proposes a crucible speed control strategy based on Linear Active Disturbance Rejection Control ( LADRC ). By constructing an extended state observer ( ESO ) and a nonlinear state error feedback ( NLSEF ), the real-time estimation and dynamic compensation of the internal and external disturbances of the system are realized, and the problem of insufficient anti-disturbance ability of traditional PID control is solved. Simulation and experiments show that compared with the conventional PID control, the proposed method reduces the overshoot by 13.2 % and the adjustment time by 48.5 % in the step response. It can effectively suppress the influence of temperature fluctuation, mechanical vibration and other interference factors on the speed stability during crystal growth. The research results provide effective control method support for improving the quality of large diameter single crystal.

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